The composition of the abrasive slurry depends on the target you are polishing.
50
10.2
1.37
77nm
Metal, Sapphire, Quartz, Glass(Blue, LCD,) Polishing
40
9.0
1.27
77nm
Metal, Sapphire, Quartz, Glass(Blue, LCD,) Polishing
40
9.3
1.27
77nm
Metal, Sapphire, Quartz, Glass(Blue, LCD,) Polishing
40
10.3
1.27
80nm
High Removal rate for Sapphire